First, the maintenance spare parts supply process of a two-echelon support system under cannibalization was studied, and the system availabilities under three strategies including non-cannibalization strategy, cannibalization strategy and partial cannibalization strategy were analyzed. Based on this, the inventory optimization model was established. The system availability was used as the constraint while the minimize support costs were taken as optimization objective, and the marginal analysis method was selected to solve the model. The results by comparing to different strategies indicate that taking cannibalization strategy can reduce inventory and total costs under minimum availability, and can effectively improve equipment availability under certain inventory.